Polishing of Ultra Smooth Surface with Nanoparticle Colloid Jet
A nanoparticle colloid jet machining system has been developed for polishing ultra smooth surface of brittle materials. Interaction between nanoparticles and work surface in nanoparticle colloid jet machining has been given, and the theoretical dependence of the material removal rate with various important process parameters of the nanoparticle colloid jet machining have been investigated through material removal experiments. Some material removal results of nanoparticle colloid jet machining show that it is possible to obtain removal rates of one nanometer level per minute for glass surfaces with appropriate machining process parameters. A K9 glass surface was polished for obtaining ultra smooth surface. The surface roughness value of atomic force microscopy (AFM) observations is under 1nm Rms.
F. H. Zhang et al., "Polishing of Ultra Smooth Surface with Nanoparticle Colloid Jet", Key Engineering Materials, Vol. 404, pp. 143-148, 2009