On the Polishing Techniques of Diamond and Diamond Composites

Article Preview

Abstract:

This article reviews the state-of-the-art techniques for polishing diamond and polycrystalline diamond composites. A focus is on their material removal mechanisms and features. It concludes that while each of them has its advantages and drawbacks, the technique by dynamic friction has a promising potential for polishing production.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

85-96

Citation:

Online since:

January 2009

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2009 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] J. Wilks, E. Wilks: Properties and Applications of Diamond, Butterworth Heinemann, (1991).

Google Scholar

[2] J.E. Field: The Properties of . atural and Synthetic Diamonds, London: Academic Press, (1992).

Google Scholar

[3] H.O. Pierson: Handbook of Carbon, Graphite, Diamond and Fullerences: Properties, Processing and Applications, New Jersey, U.S.A.: Noyes Publications, (1993).

Google Scholar

[4] M. Prelas, G. Popovicci and and et al.: Handbook of Industrial Diamonds and Diamond Films, New York: Marcel Dekker, (1998).

Google Scholar

[5] B. Bhushan, V.V. Subramaniam and and et al.: Diamond Films and Technology, Vol. 4 (1994), pp.71-97.

Google Scholar

[6] T.S. Sudarshan: in: Surface Modification Technologies VIII, T.S.S.M. Jeandin, Editor. 1995, The Institute of Materials, pp.469-481.

Google Scholar

[7] A.P. Malshe, B.S. Park and and et al.: Diamond and Related Materials, Vol. 8 (1999), p.11981213.

Google Scholar

[8] V.G. Ralchenko and S.M. Pimenov: in Handbook of Industrial diamonds and Diamond Films, M.A. Perlas, Popovici G., and Bigelow L.K., Editors. 1998, Marcel Dekker: New Nork, pp.983-1021.

Google Scholar

[9] S.E. Grillo and J.E. Field: J. Phys. D: Appl. Phys., Vol. 30 (1997), pp.202-209.

Google Scholar

[10] J.R. Hird and J.E. Field, Wear, Vol. 258 (2005), pp.18-25.

Google Scholar

[11] Y. Chen: Polishing of Polycrystalline Diamond Composites, PhD Thesis, The University of Sydney, (2007).

Google Scholar

[12] M. Tolkowsky: Research on the Abrading, Grinding or Polishing of Diamond, D. Sc. Thesis, University of London, (1920).

Google Scholar

[13] W.J. Zong, D. Li and and et al.: Int J. Machine Tools and Manufacture, Vol. 45 (2005), p.783788.

Google Scholar

[14] F.M. Van Bouwelen: Diamond and Related Materials, Vol. 9 (2000): 925-928.

Google Scholar

[15] F.M. Van Bouwelen, J.E. Field and et al.: Philosophical Magazine, Vol. 83 (2003), pp.839-855.

Google Scholar

[16] S.E. Grillo, J.E. Field: Wear, Vol. 211 (1997), pp.30-34.

Google Scholar

[17] S.E. Grillo, J.E. Field and et al.: J. Phys. D: Appl. Phys., Vol. 33 (2000), pp.985-990.

Google Scholar

[18] F. Van Bouwelen, W.V. Enckevort: Diamond and Related Materials, Vol. 8 (1999), pp.840-844.

DOI: 10.1016/s0925-9635(98)00347-1

Google Scholar

[19] J.R. Hird and J.E. Field: Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 460 (2004), pp.3547-3568.

Google Scholar

[20] M.R. Jarvis, R. Perez and et al.: Physical Review Letters, Vol. 80 (1998), pp.3428-3431.

Google Scholar

[21] M.P. Hitchiner, E.M. Wilks and et al.: Wear, Vol. 94 (1984), pp.103-120.

Google Scholar

[22] J.R. Hird, M. Bloomfield and et al.: Philosophical Magazine, Vol. 87 (2007), pp.267-280.

Google Scholar

[23] C.J. Tang, A.J. Nevesa and et al.: Diamond and Related Materials, Vol. 12 (2003), p.14111416.

Google Scholar

[24] G.A. Kim: Method of Machining Hard and Brittle Material, 1987, p.4643161.

Google Scholar

[25] H.Y. Tsai, C.J. Ting and et al.: Diamond and Related Materials, Vol. 16 (2007), pp.253-261.

Google Scholar

[26] C.D. Ollison, W.D. Brown and et al.: Diamond and Related Materials, Vol. 8 (1999), p.10831090.

Google Scholar

[27] C.Y. Wang, F.L. Zhang and et al.: Thin Solid Films, Vol. 496 (2006), pp.698-702.

Google Scholar

[28] J. Kuhnle and O. Weis: Surface Science, Vol. 340 (1995), pp.16-22.

Google Scholar

[29] B. Bhushan, V.V. Subramaniam and et al.: Journal of Applied Physics, Vol. 74 (1993), p.41744180.

Google Scholar

[30] H. Hocheng and C.C. Chen: Materials Science Forum, Vol. 505-507, pt. 2 (2006), pp.1225-30.

Google Scholar

[31] J.E. Graebner, S. Jin and et al.: Method and Apparatus for Chemical-mechanical Polishing of Diamond, 1998, US patent, 5746931.

Google Scholar

[32] C.Y. Cheng, H.Y. Tsai and et al.: Diamond and Related Materials, Vol. 14 (2005), pp.622-625.

Google Scholar

[33] J.A. Weima, W.R. Fahrne and et al.: Journal of Solid State Electrochemistry, Vol. 5 (2001), pp.112-118.

Google Scholar

[34] C.H. Hsieh, H.Y. Tsai and et al.: in: Proceedings of SPIE. (2002).

Google Scholar

[35] W.C. Chou, C.L. Chao and et al.: Key Engineering Materials, Vol. 329 (2007), pp.195-200.

Google Scholar

[36] W.S. Lee, Y.J. Baik and et al.: Diamond and Related Materials, Vol. 4 (1995), pp.989-995.

Google Scholar

[37] H. Tokura, C.F. Yang and et al.: Thin Solid Films, Vol. 212 (1992), pp.49-55.

Google Scholar

[38] R. Ramesham and M.F. Rose: Thin Solid Films, Vol. 320 (1998), pp.223-227.

Google Scholar

[39] S.K. Choi, D.Y. Jung and et al.: Thin Solid Films, Vol. 279 (1996), pp.110-114.

Google Scholar

[40] J.A. Weima, R. Job and et al.: in: IECO. Proceedings (Industrial Electronics Conference), (2000).

Google Scholar

[41] C. Hickey, T. Thorpe and et al.: Proceedings of SPIE - Diamond Optics IV, Vol. 1534 (1991), pp.67-76.

Google Scholar

[42] J.A. Weima, J. Von Borany and et al.: J. the Electrochemical Society, Vol. 148 (2001), pp. G607-610.

Google Scholar

[43] J.A. Weima, A.M. Zaitsev and et al.: in: IECO. Proc. (Industrial Electronics Conference), (1999).

Google Scholar

[44] J.A. Weima, R. Job and et al.: Journal of Applied Physics, Vol. 87 (2000), pp.4553-4557.

Google Scholar

[45] A.M. Zaitsev, G. Kosaca and et al.: Diamond and Related Materials, Vol. 7 (1998), p.11081117.

Google Scholar

[46] Z.W. Jiang, J.M. Zhang and et al.: Optics and Precision Engineering, Vol. 10 (2002), pp.50-55.

Google Scholar

[47] S. Jin, J.E. Graebner and et al.: Applied Physics Letters, Vol. 60 (1992), p.1948-(1950).

Google Scholar

[48] Y.J. Sun, S.B. Wang and et al.: Rare Metal Materials and Engineering, Vol. 36 (2007), p.892895.

Google Scholar

[49] M. Mccormack, S. Jin and et al.: Diamond and Related Materials, Vol. 3 (1994), pp.254-258.

Google Scholar

[50] J.Y. Wang, A.Z. Jin and et al.: Journal of Inorganic Materials, Vol. 17 (2002), pp.172-174.

Google Scholar

[51] S. Jin, J.E. Graebner and et al.: Nature, Vol. 362 (1993), pp.822-824.

Google Scholar

[52] S. Jin, J.E. Graebner and et al.: Diamond and Related Materials, Vol. 1 (1992), pp.949-953.

Google Scholar

[53] Y. Sun, S. Wang and et al.: Diamond and Related Materials, Vol. 15 (2006), pp.1412-1417.

Google Scholar

[54] C.E. Johnson: Surface and Coatings Technology, Vol. 68-69 (1994), pp.374-377.

Google Scholar

[55] Y. Tzeng: Method of polishing diamond films, 2000, United States, US6284315.

Google Scholar

[56] S. Gloor, S.M. Pimenov and et al.: Diamond and Related Materials, Vol. 7 (1998), pp.607-611.

Google Scholar

[57] T. Zhao, D.F. Grogan and et al.: Diamond Optics III, SPIE Proc., Vol. 1325 (1990), pp.142-51.

Google Scholar

[58] S. Ilias, G. Sene and et al.: Diamond and Related Materials (1996), pp.835-839.

Google Scholar

[59] B. Koslowski, S. Strobel and et al.: Diamond and Related Materials, Vol. 9 (2000), p.11591163.

Google Scholar

[60] T. Seki and J. Matsuo: Beam Interactions with Materials and Atoms, Vol. 216 (2004), p.191195.

Google Scholar

[61] A. Hirata, H. Tokura and et al.: Thin Solid Films, Vol. 212 (1992), pp.43-48.

Google Scholar

[62] F. Silva, R.S. Sussmann and et al.: Diamond and Related Materials, Vol. 12 (2003), pp.369-373.

Google Scholar

[63] C. Vivensang, L. Ferlazzo-Manin and et al.: Diamond and Related Materials, Vol. 5 (1996), pp.840-844.

Google Scholar

[64] H. Buchkremer-Hermanns, C. Long and et al.: Diamond & Related Materials, Vol. 5 (1996), pp.845-849.

Google Scholar

[65] P.W. Leech, G.K. Reeves and et al.: Diamond and Related Materials, Vol. 11 (2002), p.833836.

Google Scholar

[66] Y. Ando, Y. Nishibayashi and et al.: Diamond and Related Materials, Vol. 11 (2002), p.824827.

Google Scholar

[67] J.K. Park, V.M. Ayres and et al.: Diamond and Related Materials, Vol. 9 (2000), pp.1154-1158.

Google Scholar

[68] S. Tezuka and M. Yosikawa: J the Japan Society of Precision Engineering, Vol. 56 (1990), pp.2255-2260.

Google Scholar

[69] V.N. Tokarev, J.I.B. Wilson and et al.: Diamond and Related Materials, Vol. 4 (1995), p.169176.

Google Scholar

[70] P. Ascarelli, E. Cappelli and et al.: Proceedings of SPIE, Vol. 3404 (1998), pp.178-186.

Google Scholar

[71] A.M. Ozkan, A.P. Malshe and et al.: Diamond and Related Materials, Vol. 6 (1997), p.17891798.

Google Scholar

[72] U. Bogli, A. Blatter and et al.: Diamond and Related Materials, Vol. 2 (1993), pp.924-927.

Google Scholar

[73] S.M. Pimenov, A.A. Smolin and et al.: Diamond and Related Materials, Vol. 2 (1993), p.291297.

Google Scholar

[74] S. Gloor, W. Luthy and et al.: Applied Surface Science, Vol. 138-139 (1999), pp.135-139.

Google Scholar

[75] T. Chein, C. Cutshaw and et al.: Proc the Applied Diamond Conference (1995), pp.257-260 V. 1.

Google Scholar

[76] C.G. Peters, W.B. Emerson and et al.: J Res Natioanl Bureau of Standards, Vol. 38 (1947), pp.449-464.

Google Scholar

[77] Z.N. Guo, Z.G. Huang and et al.: Key Engineering Materials, Vol. 257-258 (2004), pp.489-494.

Google Scholar

[78] Z.N. Guo, C.Y. Wang and et al.: Materials and Manufacturing Processes, Vol. 17 (2002), p.4555.

Google Scholar

[79] W.Z. Lu, D.W. Zuo and et al.: Key Engineering Materials, (2006), pp.1013-9826.

Google Scholar

[80] K. Suzuki, N. Yasunaga and et al.: Proc ASPE, (1996), pp.482-485.

Google Scholar

[81] K. Suzuki, M. Iwai and et al.: Key Engineering Materials, Vol. 238-239 (2003), pp.235-240.

Google Scholar

[82] Y. Chen, L.C. Zhang and et al.: Int J Machine Tools and Manufacture, Vol. 46 (2006), p.580587.

Google Scholar

[83] Y. Chen, L.C. Zhang and et al.: Int J Machine Tools and Manufacture, Vol. 47 (2007), p.16151624.

Google Scholar

[84] Y. Chen, L.C. Zhang and et al.: Int J Machine Tools and Manufacture, Vol. 47 (2007), p.22822289.

Google Scholar

[85] Y. Chen, L.C. Zhang and et al.: Int J Surface Science and Engineering, Vol. 1 (2007), p.360373.

Google Scholar

[86] Y. Chen, L.C. Zhang and et al.: Key Engineering Materials, Vol. 364-366 (2008), pp.226-231.

Google Scholar

[87] Y. Chen, L.C. Zhang and et al.: Key Engineering Materials, Vol. 381-382 (2008), pp.513-516.

Google Scholar

[88] T. Abe and et al.: Grinding and Polishing Tool for Diamond, 2003, US patent 6, 592, 436.

Google Scholar

[89] B. Bhushan, B.K. Gupta: Handbook of Tribology, New York: McGraw-Hill, (1991).

Google Scholar