Development of Multiscale Simulation System for Nano-Processes

Abstract:

In contrast to microscale method (molecular dynamics) or macroscale method (FEM), multiscale modeling is a new, fast developing and challenging scientific field with contributions from many scientific disciplines in an effort to assure materials simulation across length/time scale. In this paper we propose MPM/MD handshaking method to establish multiscale modeling of thin film formation/nanocutting. First, the detailed handshaking method is presented for large scale simulation along with basic principles of the multiscale approach. Then, quantitative items: flatness, cutting force, adhesion between cluster and substrate, etc. are provided to avoid drawbacks of current qualitative manner. Finally, simulations are carried out to clarify the efficiency of system.

• Periodical: Key Engineering Materials (Volumes 407-408)
• Pages: 452-455
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.407-408.452
• Online since: February 2009
• Authors: Hua Wei Chen, A. Kiet Tieu, Ichiro Hagiwara
• Keywords: Molecular Dynamic (MD), MPM, Multi-Scale Simulation, Nanocutting

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[10] [20] [30] [40] [50] [60] [70] [80] [90] 100.

[1] 10 100 1000 3000 Velocity of Cluster (m/s) Flatness (%) 203 primary 203 secondary 563 primary 563 secondary 1563 primary 1563 secondary.

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[1] 10 100 10 00 30 00 Vel ocit y of Clu ster (m/ s) Degre e of E pitaxy (%).

[2] 03 P ri mar y 20 3 Secon dary.

[5] 63 P ri mar y 56 3 Secon dary.

[1] 563 P r imary 15 63 Seco ndary Fig. 6 Adhesion between cluster and substrate at 600K.

[10] [0] [10] [1] [10] [2] [10] [3] [1] [2] [3] [4] [5] [6] [7] [8] [9] [10] [11] [12] Velocity of cluster Adhesion force (eV/ o A) 203-primary 203 secondary 563-primary 563 secondary 1563-primary 1563 secondary.