Fractographic Analysis of Very Small Theta Specimens

Abstract:

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The theta test specimen is a versatile tool for evaluating the strength of extremely small structures. Round and hexagonal rings are compressed vertically on their ends creating a uniform tension stress in the middle gauge section. The simple compression loading scheme eliminates the need for special grips. A conventional nanoindentation hardness machine with a flat indenter applied load, monitored displacement, and recorded fracture loads. Prototype miniature specimens with web sections as thin as 7.5 m were fabricated by deep reactive ion etching (DRIE) of single crystal silicon wafers. The strength limiting flaws were 200 nm to 500 nm deep surface etch pits.

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Periodical:

Edited by:

J. Dusza, R. Danzer, R. Morrell and G.D. Quinn

Pages:

201-208

DOI:

10.4028/www.scientific.net/KEM.409.201

Citation:

G. D. Quinn "Fractographic Analysis of Very Small Theta Specimens", Key Engineering Materials, Vol. 409, pp. 201-208, 2009

Online since:

March 2009

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$35.00

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