Chemical Vapor Deposition of TiO2 for Photocatalytic Applications and Biocidal Surfaces
Through a few examples, we present a short review on properties and applications of TiO2 films deposited by various CVD processes. The constraints due to the growth process make difficult optimization of properties that were correlated with microstructures. We focus on the photocatalytic activity in the visible range and on the antibacterial behavior of these functional thin layers.
F. Maury and J. Mungkalasiri, "Chemical Vapor Deposition of TiO2 for Photocatalytic Applications and Biocidal Surfaces", Key Engineering Materials, Vol. 415, pp. 1-4, 2009