Design and Fabrication of a Multi-Functional Nanomanipulator
With rapid expansion of nanotechnology, microminiaturization has become imperative in the field of micro/nano fabrication. A nanomanipulation system with high degrees of freedom that can perform nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM) is presented. The manipulation system consists of several individual operating units each having three linear stages and one rotational stage. The body of the manipulator is designed using the idea of superposition. Each operating unit can move in the permissible range of SEM’s vacuum chamber and can increase or decrease the number of units according to the requirement. Experiments were executed to investigate the in-situ electrical resistance of nano materials.
Daizhong Su, Qingbin Zhang and Shifan Zhu
M. Chang et al., "Design and Fabrication of a Multi-Functional Nanomanipulator", Key Engineering Materials, Vols. 419-420, pp. 21-24, 2010