Design and Fabrication of a Multi-Functional Nanomanipulator

Ming Chang; Chia Hung Lin; Chung Po Lin; Juti Rani Deka

doi:10.4028/www.scientific.net/KEM.419-420.21

Paper Titles

Effects of Surface Roughness on Tribological Characteristics in Micro Double Cup Extrusion of Aluminum
p.5

Effect of the Bearing Preload on the Characteristics of the Spindle Stiffness
p.9

Dynamic Analysis of a 6-DOF Inverted Stewart Platform
p.13

On Numerical Simulations of the Micro-Gears and their Cold Forging Process
p.17

Design and Fabrication of a Multi-Functional Nanomanipulator
p.21

Topological Optimum Design Considering Stress Constraint Using Approximate Function
p.25

Numerical Modeling and Design of an Inspection Device with Thermoelectric Coolers for the Coke Oven
p.29

Modeling of Thermoelectric Coolers for Freezing/Thawing Applications
p.33

Numerical Simulation and Experimental Measurement of a Printed Circuit Board Subjected to Drop Test
p.37

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Design and Fabrication of a Multi-Functional Nanomanipulator

Abstract:

With rapid expansion of nanotechnology, microminiaturization has become imperative in the field of micro/nano fabrication. A nanomanipulation system with high degrees of freedom that can perform nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM) is presented. The manipulation system consists of several individual operating units each having three linear stages and one rotational stage. The body of the manipulator is designed using the idea of superposition. Each operating unit can move in the permissible range of SEM’s vacuum chamber and can increase or decrease the number of units according to the requirement. Experiments were executed to investigate the in-situ electrical resistance of nano materials.