. The purpose of this paper is to study the application of electrochemical machining (ECM) technology for the fabrication of micro structures. The stray current corrosion, i.e. machining localization is a critical obstacle to micro fabrication for ECM. To machine micro structures by electrochemical machining ultra short voltage pulse is used. The effects of electrochemical machining parameters such as voltage, pulse duration, pulse frequency, and electrolyte composition on the machining accuracy were studied. In experiments, a micro hole was machined on stainless steel with cylindrical and square electrodes to investigate these effects.