Research on High-Speed Preparation of Micro-Nanocrystalline Diamond Film

Bing Kun Xiang; Dun Wen Zuo; Duo Sheng Li; Rong Fa Chen; Ming Wang

doi:10.4028/www.scientific.net/KEM.431-432.37

Paper Titles

Simulation of Gas Flow Field in HFCVD System for CVD Diamond Growth
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Experimental Research on Cutting of Silicon with Fixed Diamond Wire Saw
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Fatigue Life Simulation on Forestay Bar of Aircraft Landing Gear
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Effect of Anisotropy on Chemical Mechanical Polishing of LBO Crystal
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Research on High-Speed Preparation of Micro-Nanocrystalline Diamond Film
p.37

Rapid Parameter Optimization of High Speed Milling Aluminum Alloy Thin-Walled Workpiece
p.41

Modeling and Analyzing the Temperature Field of the Swing Substrate in Miniature EACVD System
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The Clamping System Based on Giant Magnetostrictive Material and Displacement Amplifier with Area Effect
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Study on Milling Dynamics of the Thin-Webbed Structure Component
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 431-432Research on High-Speed Preparation of...

Research on High-Speed Preparation of Micro-Nanocrystalline Diamond Film

Abstract:

Micro-nanocrystalline diamond (M-NCD) Film may be successfully prepared on Mo substrate with DC arc plasmas jet deposition device. This paper studies the influences of carbon source concentration on the shape of M-NCD Film particles under circumstances of stable electric arc, and characterizes the grain size and quality of samples through SEM, AFM and Raman spectrum. The research result shows that, in the state of stable electric arc, relatively low carbon source concentration (1%) could deposit high-quality microcrystalline diamond film on the substrate, with a growth rate of up to 8.3μm/h and grain size of about 2～4μm; relatively high carbon source concentration (10% or 15%) could deposit high-quality nanocrystalline diamond(NCD) film on the microcrystalline diamond film at high speed, with a growth rate of up to above 12.6μm/h or 19.7μm/h, grain size of about 4～80nm and average grain size of 27.4nm.

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Periodical:

Key Engineering Materials (Volumes 431-432)

Pages:

37-40

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.431-432.37

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Online since:

March 2010

Authors:

Bing Kun Xiang, Dun Wen Zuo, Duo Sheng Li, Rong Fa Chen, Ming Wang

Keywords:

Carbon Source Concentration, DC Arc Plasma Jet, High Speed Preparation, Micro-Nanocrystalline Diamond

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