W-Doped DLC Films by IBD and MS

Zhi Qiang Fu; Cheng Biao Wang; Wei Wang; Zhi Jian Peng; Xiang Yu; Song Sheng Lin; Ming Jiang Dai

doi:10.4028/www.scientific.net/KEM.434-435.477

Paper Titles

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Preparation and Oxidation Resistance of the Borate Glass Coating on Graphite Anode
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Tribological Behaviors of W-Doped DLC Films
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W-Doped DLC Films by IBD and MS
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Titanium Nitride Coatings on Ti Alloys by PIRAC for Orthopedic Implants
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In Situ-Fabrication of TiCN Ceramic Coating on Titanium Alloy by Laser Cladding Technology
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Influence of Electrophoretic Deposition Voltage on the Phase, Microstructure and Property of a Nano-SiC Coating
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Deposition Kinetics of the Cristobalite Aluminum Phosphate Coating on SiC Coated Carbon/Carbon Composites Prepared by Hydrothermal Electrophoretic Technique
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 434-435W-Doped DLC Films by IBD and MS

W-Doped DLC Films by IBD and MS

Abstract:

W-doped DLC films were synthesized from ethyne and tungsten by ion beam deposition and magnetron sputtering, and the influence of W target current on the structures and the properties of W-doped DLC films were studied. There exist some defects smaller than 3micron in W-doped DLC films and the influence of W target current on the defects is unobvious. The W content in the films is tardily increased with W target current below 3.5A, and then acutely rises with W target current. When target current is below 3.5A, the ratio of sp3-C to sp2-C is first decreased and then increased with the rise of target current, and the ratio of WC-C to sp2-C is close to 0; but when the target is above 3.5A, the ratio of sp3-C to sp2-C is decreased and the ratio of WC-C to sp2-C is augmented with further increasing target current. The hardness and the modulus is first decreased with target current and the minimum value is reached for the W-doped DLC films deposited with a target current of 2.6A. The W-doped DLC films deposited with a target current of 2.6A exhibit the best film-substrate adhesion. The W-doped DLC films deposited with a low target current exhibit a friction coefficient while the wear resistance of the W-doped DLC films deposited with a medium target current of 2.6A is best.