Uncertainty Estimation in Intelligent Coordinate and Profile Measurement

Kiyoshi Takamasu; Satoru Takahashi; Xin Chen

doi:10.4028/www.scientific.net/KEM.447-448.564

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 447-448Uncertainty Estimation in Intelligent Coordinate...

Uncertainty Estimation in Intelligent Coordinate and Profile Measurement

Abstract:

The uncertainty estimation of coordinate and profile measurement is essential for accurate measurement and establishment of traceability. We proposed an uncertainty propagation method to estimate the uncertainty of coordinate and profile measurement. In this article, the multi sensor algorithm with uncertainty estimation method is described for the profile measurement. Additionally, two examples of multi sensor method are introduced. According to the simulation results of assessing uncertainty and the experimental results, the validity of the method was confirmed.

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Periodical:

Key Engineering Materials (Volumes 447-448)

Pages:

564-568

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.447-448.564

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Online since:

September 2010

Authors:

Kiyoshi Takamasu, Satoru Takahashi, Xin Chen

Keywords:

Coordinate Measurement, Multi-Sensor Method, Profile Measurement, Uncertainty Estimation

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References

[1] K. Takamasu, S. Takahashi, M. Abbe and R. Furutani: Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement, ISMTII2007 (2007).

DOI: 10.1088/0957-0233/19/8/084001

Google Scholar

[2] O. Sato, K. Shimojima, R. Furutani and K. Takamasu: Artifact calibration of parallel mechanism, kinematic calibration with a priori knowledge, Meas. Sci. Technol. 15 (6), 1158-1165 (2004).

DOI: 10.1088/0957-0233/15/6/017

Google Scholar

[3] K. Takamasu, S. Takahashi, M. Abbe and R. Furutani: Uncertainty estimation for coordinate metrology with effects of calibration and form deviation in strategy of measurement, Meas. Sci. Technol. 19 (8), 084001 (2008).

DOI: 10.1088/0957-0233/19/8/084001

Google Scholar

[4] C. Elster and I. Weingärtner: Coupled distance sensor systems for high-accuracy topography measurement, Prec. Eng. 30, 32-38 (2006).

DOI: 10.1016/j.precisioneng.2005.04.001

Google Scholar

[5] W. Gao, J. Yokoyama, H. Kojima, S. Kiyono: Precision measurement of cylinder straightness using a scanning multi-probe system, Prec. Eng. 26, 279-288 (2002).

DOI: 10.1016/s0141-6359(02)00106-x

Google Scholar

[6] S. Liu, K. Watanabe, X. Chen, S. Takahashi and K. Takamasu: Profile measurement of a wide-area resist surface using a multi-ball cantilever system, Prec. Eng. 33, 50-55 (2009).

DOI: 10.1016/j.precisioneng.2008.03.004

Google Scholar

[7] X. Chen, K. Kotani and K. Takamasu: Study on Algorithm of Reconstructing Topography Based on Topography Difference, euspen2007, 365-368 (2007).

Google Scholar