Compound micro-machining is the most promising technology for the production of miniaturized parts and this technology is becoming more and more important and popular because of growing demand for industrial products with not only increased number of functions but also of reduced dimensions, higher dimensional accuracy and better surface finish. In this paper, the development efforts in micro/nano-machining based on solid tools (tool-based micro/nano-machining) in NUS are introduced. In order to achieve meaningful implementation of micro-machining techniques, this research seeks to address four important areas; namely (a) development of machine tool capable to do both conventional micro-machining, (b) process control, (c) process development to achieve necessary accuracy and quality, and (d) on-machine measurement and inspection. An integrated effort in these areas has resulted in successful fabrication of micro-structures that is able to meet the miniaturization demands of the industry. In the area of nano-machining machine tool and process developments have also been carried out for electrolytic in-process dressing (ELID) grinding and ultra precision machining using single point and poly crystalline diamond tools to produce nano surface finish on hard and brittle materials. An ultra-precision diamond turning machine has been developed which incorporates a fast and fine tool servo system to produce nano-precision surfaces and features.