Assembly of Nanostructures by Using a Mechanical Nanomanipulator

Ming Chang; Po Cheng Chen; Chung Po Lin; Yu Han Chang

doi:10.4028/www.scientific.net/KEM.450.263

Paper Titles

Productivity Improvement with Lean Production in Glove Manufacturing Industry
p.247

A Taguchi-Neural-Based In-Process Tool Breakage Monitoring System in End Milling Operations
p.251

Redesign of a Substructure for a Milling Machine Using Topology Optimization
p.255

A Real-Time Condition Monitoring System for a Machine Tool Spindle
p.259

Assembly of Nanostructures by Using a Mechanical Nanomanipulator
p.263

Sensor Fusion for Condition Monitoring System of End Milling Operations
p.267

Study of an Identification Method of the Mesoscale Tool Position
p.271

Evaluation of Component Reliability Using Data Derived from Infrared Thermography
p.275

Impact of Integral Structures in the Design for Manufacture and Assembly of Airframes
p.279

HomeKey Engineering MaterialsKey Engineering Materials Vol. 450Assembly of Nanostructures by Using a Mechanical...

Assembly of Nanostructures by Using a Mechanical Nanomanipulator

Abstract:

A mechanical nanomanipulation system has been developed for the assembly and fabrication of nano-devices inside a scanning electron microscope (SEM). The mechanical manipulator is made up of commercially available actuators and positioning stages which consists of three individual operation units each having three linear stages and one rotational stage. Experiments were performed to construct 2D and 3D nanostructures with Au nanowires. Versatile manipulations including shape modification, length amendment, and connection of nanowires were carried out. An electron beam induced deposition (EBID) technique was used to grasp nano-materials and assemble them, enabling 2D and 3D manipulation to be easier to conduct. Experimental results show that this manipulator is possible to play an important role in enabling the technology of assembling nano-scale mechanical and electronic devices from prefabricated nano-scale components.