Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter

Yong Mei Zhao; Jin Ning; Guo Wei Han; Chao Wei Si

doi:10.4028/www.scientific.net/KEM.483.112

Paper Titles

Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching
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A Capacitor-Free CMOS Low-Noise, Low-Dropout Regulator for Capacitive Micro-Machined Accelerometer Application
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3D Pyramidal Micropool Array Electrode for Amperometric Microsensor
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Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects
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Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter
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Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever
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Structure Design and Experiment for a Resonant Accelerometer based on Electrostatic Stiffness
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Two-Dimensional Motor Based on Surface Acoustic Wave
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A Triple Channel High Rejection RF MEMS Switched Filter Bank
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Fabrication and Characterisation of...

Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter

Abstract:

The rapid growth of micromaching technology makes the miniaturized or integrated MEMS resonator or filter become possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonators coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of 30 MHz of the micromechanical bandpass filter is demonstrated.