Volume is indexed by Thomson Reuters CPCI-S (WoS).
This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research / Nanotubes / Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.

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Info:

eBook:

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ToC:

Table of contents

Editors:

Xiaohao Wang

DOI:

https://doi.org/10.4028/b-krf4ZC

THEMA:

TGM

BISAC:

TEC021000

Keywords:

Accelerometer, ANSYS, Capacitive, Carbon Nanotube (CN), Finite Element Model (FEM), Gyroscope, MEMS Accelerometer, Micro-Channel, Micro-Electromechanical System (MEMS), Microneedle, Microstructure, MOEMS, Molecular Dynamic Simulation, Piezoelectric Effect, Pressure Sensor, Quartz-Crystal, RF MEMS, Sensitivity, Sigma-Delta, Stability

Details:

Selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology (CSMNT) and 2th International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi’an, China

Pages:

830

Year:

2011

ISBN-13 (softcover):

9783037851753

ISBN-13 (CD):

9783037950005

ISBN-13 (eBook):

9783038135036

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