Description: Volume is indexed by Thomson Reuters CPCI-S (WoS).
This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research / Nanotubes / Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.

NEMS/MEMS Technology and Devices, ICMAT2011

Edited by: Lynn Khine and Julius M. Tsai

Online since: May 2011

Description: The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.