The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.

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eBook:

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ToC:

Table of contents

Editors:

Lynn Khine and Julius M. Tsai

DOI:

https://doi.org/10.4028/b-3EnkIB

THEMA:

TGM

BISAC:

TEC021000

Keywords:

Accelerometer, Actuator, Biosensor, Bulk Micromachining, Capsule Endoscopy, Cavity-Mode, Centrifugal Microfluidics, FBAR, Lab-on-a-Disc, Micro-Electromechanical System (MEMS), Micro-Fluidics, Micropump, Peltier, Piezoresistive, Polyimide, RF Magnetron Sputtering, RF MEMS, SOI, Thermoelectric, X-Ray Diffraction (XRD)

Details:

Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore

Pages:

236

Year:

2011

ISBN-13 (softcover):

9783037851456

ISBN-13 (CD):

9783037851463

ISBN-13 (eBook):

9783038136095

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Review from Ringgold Inc., ProtoView: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applications related to nanoelectromechanical systems (NEMS), microelectromechanical systems (MEMS), and micro total analysis systems. Major themes are theory, design, and analysis of NEMS/MEMS; NEMS/MEMS fabrication technologies; sensors, actuators and microsystems; RF MEMS devices and characterization; microfluidics and micro total analysis systems; nanotechnology and nano devices; and optical MEMS, nanophotonics, and plasmonics. Some specific topics include thick-film deposition of high-viscous liquid photopolymer, separation gap estimation in dynamic systems, and a static micromixer inspired by fractal-like natural flow systems. Other subjects include a novel approach to MEMS based on biological sensory systems, design considerations of membrane structure for a thermal actuated micropump, fabrication of a Peltier device based on InSb and SbTe thin films, and a method for quantification of meta-amyloid using a photo-sensitive thin film transistor. B&w photos and images are included.