A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass
This work focuses on the development of a biaxial fully differential capacitive microaccelerometer with a single proof-mass. Its design, optimization and fabrication are discussed in detail. Structure and geometric parameters are optimized by multidisciplinary design optimization, enabling ±1g operating range, 1182Hz resonant frequency, 97 fF/g sensitivity, 4.1mg resolution and 0.68 damping ratio. Silicon-on-glass (SOG) bulk micromachining and inductively coupled plasma (ICP) etching technologies are adopted to fabricate this accelerometer.
Y. Liu et al., "A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass", Key Engineering Materials, Vol. 483, pp. 148-153, 2011