A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames

Hai Lin Tang; Xian Xue Liu; Hao Zhou

doi:10.4028/www.scientific.net/KEM.483.169

Paper Titles

A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass
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Design and Fabrication of a Piezoelectric Sensor for Weighing in Motion
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Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-Wave MEMS Switches
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A Miniature Fluxgate Sensor with CMOS Interface Circuitry
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A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
p.169

The Design of AlGaN/GaN HEFT-Micro-Accelerometer and Temperature- Dependence Electrical Performance
p.174

Temperature Characteristic of Platinum Piezoresistive Pressure Sensor
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Design and Simulation of Electromagnetic Two-Dimensional MOEMS Scanning Mirror
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Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites
p.190

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483A Z-Axis Decoupled Micromachined Gyroscope with...

A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames

Abstract:

A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality factor of driving and sensing modes are 2000 and 800, respectively. In the range of 0~2400 deg/sec, sensitivity and linearity of the fabricated gyroscope are 1 deg/sec and 0.3%, respectively.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

169-173

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.169

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Online since:

June 2011

Authors:

Hai Lin Tang, Xian Xue Liu, Hao Zhou

Keywords:

Bonding and Deep RIE Release Process, Driving Circuit, Gyroscope, Micro-Electromechanical System (MEMS), Optimal Robustness Design, Sense Circuit

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