Design and Fabrication of Micro Oxygen Sensor

Chia Yen Lee; Long Kai Lin Liou; Chin Lung Chang; Chang Hsing Tai; Lung Ming Fu

doi:10.4028/www.scientific.net/KEM.483.237

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Experimentally Study of the Cushion Materials for Micro Accelerometer under Shock Load
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Design and Fabrication of Micro Oxygen Sensor
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Electrohydrodynamic Printing of Conductive Patterns on Glass Slides
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Improve Blood Clotting Feature of Silicon Microneedle by Silver Coating
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Design and Fabrication of Micro Oxygen Sensor

Design and Fabrication of Micro Oxygen Sensor

Abstract:

In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO₂ sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO₂ film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.