System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer

Xiao Wei Liu; Zhi Li; Guan Nan Sun; Yun Tao Liu

doi:10.4028/www.scientific.net/KEM.483.219

Paper Titles

Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness
p.195

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology
p.200

A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
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The Study of a Fluxgate SPICE Model Based on Schmitt Trigger
p.212

System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer
p.219

Technique for Compensation of Temperature Drift in Thermal Excited Si-Based Resonant Pressure Sensor
p.224

On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
p.228

Experimentally Study of the Cushion Materials for Micro Accelerometer under Shock Load
p.232

Design and Fabrication of Micro Oxygen Sensor
p.237

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483System Design of Nonideal Fourth-Order Sigma-Delta...

System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer

Abstract:

The paper describes the system design for a nonideal capacitive micromichined accelerometer in MATLAB/SIMULINK. In this paper, a fourth-order sigma-delta micromachined accelerometer system design is represented, which includes the electrode movement and circuit noise. By simulation and comparison with the ideal 4th-order sigma-delta accelerometer in MATLAB, we have found that the SNR is essentially influenced by the electrode movement. Moreover the influence of the electrode stiffness K_e is researched. We have also researched the effects of the kT/C noise and the front-end amplifier noise. This nonideal accelerometer system can represent more accurate simulation result.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

219-223

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.219

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Online since:

June 2011

Authors:

Xiao Wei Liu, Zhi Li, Guan Nan Sun, Yun Tao Liu

Keywords:

Accelerometer, Electrode Movement, Fourth-Order, Sigma-Delta

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