A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

Li Bo Zhao; En Ze Huang; Gui Ming Zhang; Yu Long Zhao; Xiao Po Wang; Zhuang De Jiang; Zhi Gang Liu

doi:10.4028/www.scientific.net/KEM.483.374

Paper Titles

Magnetic Microfluidic Mixer
p.354

Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate
p.359

Rapid Detection of Methanol in an Integration Microfluidic Chip
p.364

A Tire Pressure Monitoring System Based on MEMS Sensor
p.370

A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever
p.374

Development of the 400MHz Power Durable SAW Filter
p.381

A Research on Implantable Microelectrodes for EMG Signal Acquisition
p.387

A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer
p.392

Design and Test of a Self-Oscillating Driving ASIC for a Low-Q Gyroscope Based on PI Controller
p.396

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483A MEMS Fluid Density Sensor Based on Trapezoidal...

A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

Abstract:

A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 483)

Pages:

374-377

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.374

Citation:

Cite this paper

Online since:

June 2011

Authors:

Li Bo Zhao, En Ze Huang, Gui Ming Zhang, Yu Long Zhao, Xiao Po Wang, Zhuang De Jiang, Zhi Gang Liu

Keywords:

Density Sensor, Micro-Electromechanical System (MEMS), Rectangular Cantilever, Trapezoidal Cantilever

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Gee W.A., Ritalahti K.M., Hunt W.D., Loffler F.E.: IEEE Sensors Journal, Vol. 3, Issue 3 (2003), pp.304-309.

Google Scholar

[2] Zhuqin Liu: J. Physics experiment, Vol. 25 (2006), pp.46-47.

Google Scholar

[3] Ping Li, Xuanju Dang, Hui Chen: J. Journal of Guilin University of Electronic Technology, Vol. 19 (1999), pp.50-53.

Google Scholar

[4] Jiumin Yao, Lin Zhan: J. Journal of Tangshan Teachers College, Vol. 30 (2008), pp.15-18.

Google Scholar

[5] Changhong Xu: J. Advanced Measurement and Laboratory Management, Vol. 3 (2005), pp.28-31.

Google Scholar

[6] Libo Zhao, Enze Huang, Zhuangde Jiang, Zhigang Liu: The International Conference on Mechanic Automation and Control Engineering, 2010, pp.6082-6085.

DOI: 10.1109/mace.2010.5536685

Google Scholar