A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever
A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.
L. B. Zhao et al., "A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever", Key Engineering Materials, Vol. 483, pp. 374-377, 2011