A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

Abstract:

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A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

Info:

Periodical:

Edited by:

Xiaohao Wang

Pages:

374-377

DOI:

10.4028/www.scientific.net/KEM.483.374

Citation:

L. B. Zhao et al., "A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever", Key Engineering Materials, Vol. 483, pp. 374-377, 2011

Online since:

June 2011

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Price:

$35.00

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