A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer

Yao Guang Li; Xiao Wei Liu; Yan Xiao; Yun Tao Liu

doi:10.4028/www.scientific.net/KEM.483.422

Paper Titles

Design and Development of the Shrapnel-Borne Meteorological Exploration System Based on MEMS
p.401

Research of Curved Artificial Compound Eyes Based on MEMS Technology
p.407

Macro Machined Photoacoustic Non-Resonant Cell
p.411

Research of the Hadamard Multiplex Advantages Using a Programmable Micro-Mirror in a Near-Infrared Spectrometer
p.417

A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer
p.422

A Micro-Optical Transceiver for Interferometric Fiber Optic Gyroscope
p.427

Polarization-Noise in Integrated Optical Gyro
p.432

A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors
p.437

Silicon-Based Microneedle Array Electrodes for Biopotential Measurement
p.443

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483A High-Performance Fourth-Order Sigma-Delta...

A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer

Abstract:

This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a second-order single-loop ΣΔ modulator (ΣΔM) formed by the sensing element here the sensing element is cascaded with two extra electronic integrators to form the fourth ΣΔM, which has the advantages of better signal to quantization noise ratio (SQNR). System level simulation results indicate that the SQNR is 96.86 dB, and the effective number of bits (ENOB) is 15.8 bits when the over sampling ratio (OSR) is 128. Stability of the system is analyzed by root locus method based on the linear model established in this work, and the minimum gain of the quantizer Kq _min is about 0.375.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 483)

Pages:

422-426

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.422

Citation:

Cite this paper

Online since:

June 2011

Authors:

Yao Guang Li, Xiao Wei Liu, Yan Xiao, Yun Tao Liu

Keywords:

Accelerometer, Micro Machined, Quantization Noise, Sigma-Delta, System

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] M. Kraft, W. Redman-White and M. E. Mokhtari: Closed Loop Micromachined Ineratial Sensors with Higher Order Σ∆- Modulators, in Proc. 4th Conf. Model. Simul. Microsyst (2001), p.104–107.

Google Scholar

[2] M. A. Lemkin, B. E. Boser: A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics, IEEE Solid-State Circuits Vol. 34 (1999), p.456–468.

DOI: 10.1109/4.753678

Google Scholar

[3] Dong Y, Kraft M, White W R: Higher order noise-shaping filters for high-performance micromachined accelerometers, IEEE transactions on instrumentation and measurement Vol. 56 (2007), pp.1666-1674.

DOI: 10.1109/tim.2007.904477

Google Scholar

[4] Dong Y, Kraft M, Gollasch C, et al: A high-performance accelerometer with a fifth-order sigma-delta modulator, Micromechanics and Micro engineering Vol. 15 (2005), pp.22-29.

DOI: 10.1088/0960-1317/15/7/004

Google Scholar

[5] PETKOV V P, BOSER B E: A fourth-order sigma-delta interface for micromachined inertial sensors, IEEE Solid-State Circuits Vol. 40 (2005), pp.1602-1609.

DOI: 10.1109/jssc.2005.852025

Google Scholar