Design and Simulation of a Differential and Decoupled Micromachined Gyroscope

Yang Liu; Ling Yun Wang; Ting Ping Lei; Jiang Du; Yi Wen Jiang; Dao Heng Sun

doi:10.4028/www.scientific.net/KEM.483.674

Paper Titles

Assessing the Validity of Quantum Corrections to Molecular Dynamics Simulations of Bulk Silicon
p.653

Molecular Dynamics Study of Water Structure Confined in Vibrative Silicon Plates
p.658

Molecular Dynamic Simulations of Contact Thermal Resistance between Two Individual Silicon Nanowires
p.663

Micro-Stress Assembly of Fragile Miniature Parts
p.668

Design and Simulation of a Differential and Decoupled Micromachined Gyroscope
p.674

Analytical Solution of Mixed Electroosmotic and Pressure-Driven Flow in Rectangular Microchannels
p.679

Rapidly Identify the Critical Parameter of MEMS Device Based on Element Model Library
p.684

Electrical Characteristics of a Stimulating Microelectrode-Electrolyte Interface
p.690

Analysis of Capillary Condensation of Vapor in Multi-Wall Carbon Nanotubes
p.694

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Design and Simulation of a Differential and...

Design and Simulation of a Differential and Decoupled Micromachined Gyroscope

Abstract:

In this paper, a differential and decoupled micromachined gyroscope fabricated by through-etching the silicon substrate anodically bonded on the glass substrate was presented. The decoupled structure can make the sense mode frequency match with the drive mode frequency and reduce the quadrature error. The sensitivity is further improved by differential detection using antiphase oscillation of double masses along the drive axis. Finite-element simulation is performed with ANSYS software to analyze the vibration mode. The device employs silicon-on-glass gyroscope sensor chip processed with Deep Reactive Ion Etching (DRIE) and glass-silicon anodic bonding. Then it is tested at atmospheric pressure. Drive mode and sense mode are obtained as 2015 Hz and 1957 Hz which are closed to the simulated ones. Q factor of the drive and sense mode also can be gained as 56 and 3.4.

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Periodical:

Key Engineering Materials (Volume 483)

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674-678

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https://doi.org/10.4028/www.scientific.net/KEM.483.674

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June 2011

Authors:

Yang Liu, Ling Yun Wang, Ting Ping Lei, Jiang Du, Yi Wen Jiang, Dao Heng Sun

Keywords:

Decoupled, Differential Detection, Gyroscope

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