The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
Polysilicon is a very attractive material in microelectronics for thermal sensors. In this paper, the effect of humidity on thermal resistance of surface micromachined polysilicon is invested. It is found that the thermal conductivity variation of air due to humidity changes the suspended polysilicon resistor evidently. This property could be used as the working principle of relative humidity sensor.
H. Y. Ma et al., "The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor", Key Engineering Materials, Vol. 483, pp. 775-778, 2011