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The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor

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Abstract:

Polysilicon is a very attractive material in microelectronics for thermal sensors. In this paper, the effect of humidity on thermal resistance of surface micromachined polysilicon is invested. It is found that the thermal conductivity variation of air due to humidity changes the suspended polysilicon resistor evidently. This property could be used as the working principle of relative humidity sensor.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

775-778

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.775

Citation:

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Online since:

June 2011

Authors:

Hong Yu Ma, Wei Dong Zhang, En Jie Ding

Keywords:

Humidity, Poly-Silicon, Thermal Conductivity (TC)

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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