Preparation of Si-C-N-O Amorphous Films from a Polysilazane by Heat Treatment at High-Temperatures

Guang Lei Hou; Zhi Jian Peng; Zhi Qiang Fu; Wen Yue; Cheng Biao Wang

doi:10.4028/www.scientific.net/KEM.492.151

Paper Titles

Ballistic Performance of TiC-TiB₂ Composite Armour under the Impact of Long-Rod Tungsten Alloy Projectiles of 1.4 Km·s^-1
p.132

Microwave Sintering of SiCp/Al Composite
p.138

Structure and Characteristics of Spherical-Pore Silicon Carbide
p.142

Study on Surface Characterization and Properties of Three Dimensional Nano-Porous Titanium Film
p.146

Preparation of Si-C-N-O Amorphous Films from a Polysilazane by Heat Treatment at High-Temperatures
p.151

Synergistic Effect of Cr-Doped DLC Coatings and Lubricant Additives
p.155

Preparation and Characterization of Nano-Films Materials
p.160

Estimate of Thermodynamic Indirect Measurement on the Electrocaloric Effect
p.164

Anisotropic Permittivity Measurement of Layered Inorganic Compounds
p.168

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Preparation of Si-C-N-O Amorphous Films from a Polysilazane by Heat Treatment at High-Temperatures

Abstract:

Si-C-N-O amorphous films were fabricated at about 800°C by pyrolysis of poly- vinylsilazane precursor films in a vacuum oven under N₂ flow. The polymer precursor films were prepared onto Si wafers by spinning from a solution of the polymer. The compositions of the as-prepared films were confirmed by X-ray diffraction, Fourier transformation infrared spectroscopy, and x-ray photoelectron spectroscopy. SEM analysis indicated that the films can be formed with thickness more than several micrometers, and very smooth surfaces. Such films will be promising in application of protecting equipments in high-temperature, corrosive and wear environments.