Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam

Kenta Miura; Yuki Machida; Masato Uehara; Hiromu Kiryu; Yusuke Ozawa; Tomoyuki Sasaki; Osamu Hanaizumi; Takahiro Satoh; Yasuyuki Ishii; Masashi Kohka; Katsuyoshi Takano; Takeru Ohkubo; Akiyoshi Yamazaki; Wataru Kada; Akihito Yokoyama; Tomihiro Kamiya; Hiroyuki Nishikawa

doi:10.4028/www.scientific.net/KEM.497.147

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 497Fabrication of Polymer Optical Waveguides for the...

Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam

Abstract:

Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly (methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.

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Periodical:

Key Engineering Materials (Volume 497)

Pages:

147-150

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.497.147

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Online since:

December 2011

Authors:

Kenta Miura, Yuki Machida, Masato Uehara, Hiromu Kiryu, Yusuke Ozawa, Tomoyuki Sasaki, Osamu Hanaizumi, Takahiro Satoh, Yasuyuki Ishii, Masashi Kohka, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya, Hiroyuki Nishikawa

Keywords:

1.5-μm Band, Optical Waveguide, PMMA, Proton Beam Writing, Single Mode, Y Junction

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