Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam
Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly (methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.
Osamu Hanaizumi, Masafumi Unno and Kenta Miura
K. Miura et al., "Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam", Key Engineering Materials, Vol. 497, pp. 147-150, 2012