A Novel Micro Mirror Spectrometer and Test Experiment

Biao Luo; Zhi Yu Wen; Hai Tao Liu; Li Chen; Rong Rong Qian

doi:10.4028/www.scientific.net/KEM.503.266

Paper Titles

Eliminating the External Libration Sound for the Optical Microsphere-Taper Coupling Structure
p.244

Development of a Portable Phosphate Detection System Using Cobalt Based Microelectrodes
p.249

Effect of Micro Structures of Diffusers on Optical Properties of LED Light
p.255

A Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction
p.260

A Novel Micro Mirror Spectrometer and Test Experiment
p.266

A Ground Target Positioning Method Facing Small UAVs
p.272

Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory
p.277

Simulation on S Parameter of an X-Band Wilkinson Power Divider
p.287

Application of ICP Deep Trenches Etching in the Fabrication of FBAR Devices
p.293

HomeKey Engineering MaterialsKey Engineering Materials Vol. 503A Novel Micro Mirror Spectrometer and Test...

A Novel Micro Mirror Spectrometer and Test Experiment

Abstract:

In order to realize more compact and in particular cost-effective spectrometers MOEMS technology offers attractive possibilities. Based Littrow spectrometer structure for the near-IR, a micro mirror grating spectrometer has been designed and developed. The ZEMAX was used for designed this structure. The resolution of this design is 10nm, the spectral range from 900nm to 1400nm. A scanning micro mirror is the key element of this IR spectrometer set-up. This micro mirror is driven by electromagnetic force. Before fix the micro mirror, it was calibrated. Meanwhile, for reducing the cost of this system, the silicon silt was designed and fabricated. For resolution testing of this spectral system, we used one light correction filters finished this experiment. The test result has shown the resolution of this spectrometer is16.8nm. Finally, the relation between the spectral line scanning characteristic and wavelength spectral resolution was discussed.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

266-271

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.266

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Online since:

February 2012

Authors:

Biao Luo, Zhi Yu Wen, Hai Tao Liu, Li Chen, Rong Rong Qian

Keywords:

Grating Spectrometer, Micro-Mirror, Miniaturized, MOEMS, Near-Infrared (NIR), Near-IR Spectrometer, Rapid Scanning

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References

[1] Information on www. teledynejudson. com.

Google Scholar

[2] Gerhard Lammel, Sandra Schweizer, and Philippe Renaud, MEMS INFRARED GAS SPECTROMETER BASED ON A POROUS SILICON TUNABLE FILTER, 578-581, 2001 IEEE(2001).

DOI: 10.1109/memsys.2001.906607

Google Scholar

[3] G. Lammel, Ph. Renaud, 3D flip-up structure of porous silicon with actuator and optical filter for micro spectrometer applications, Proc. of the 1 31h IEEE MEMS 2000 Conference, Miyazaki, Japan, pp.132-137. (2000).

DOI: 10.1109/memsys.2000.838503

Google Scholar

[4] Dötzel, W.; Gessner, T.; Hahn, R.; Kaufmann, C.; Kehr, K.; Kurth, S.; Mehner; J, Dig. Of Tech. Papers of 1997 International Conference on Solid-State Sensors and Actuators, Vol 1 pp.81-84, Chicago (1997).

DOI: 10.1109/sensor.1997.613587

Google Scholar

[5] Workman, J.: Handbook of Organic Compounds: NIR, IR, Raman, and UV-VIS Spectra Featuring Polymers and Surfactants, Volume 1, Academic Press(2001).

DOI: 10.1255/nirn.606

Google Scholar