Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum

A.H. Hamdani; A. Ansar; R. Akhter; M. Aslam

doi:10.4028/www.scientific.net/KEM.510-511.261

Paper Titles

Study of Corrosion-Electrochemical Behavior of Aluminum-Beryllium Alloys Alloyed with Yttrium, Lanthanum and Cerium
p.233

Effect of Zirconium Addition on the Grain Size and Mechanical Behavior of Aluminum Grain Refined by Titanium Plus Boron (Ti+B) in the as Cast and Cold Extruded Conditions
p.241

Preparation, Structural and Electrical Properties of Nanocrystalline Zr-Mn Cobalt-Ferrite Synthesized by the Co-Precipitation Method
p.248

Structural and Thermal Characterization of Polymorphic Er₂Si₂O₇
p.255

Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
p.261

Comparative Study of Temperature Dependent Barrier Heights of Pd/ZnO Schottky Diodes Grown along Zn- and O-Faces
p.265

Preparation and Characterization of Carbon Supported Nano-Nickel and its Sorption Behavior for Zinc from Aqueous Solutions
p.271

Effect of Cork Loading on Mechanical and Thermal Properties of Silica-Ethylene-Propylene-Diene Monomer Composite
p.277

An Electrochemical Impedance Spectroscopy Study of Al-Zn and Al-Zn-Sn Alloys in Tropical Seawater
p.284

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Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum

Abstract:

Laser Induced Plasma Assisted Ablation (LIPAA) has been used to carry out back side dry etching/ablation of different optical glasses under vacuum. It is observed that etching depth increases with decrease in target-substrate gap and becomes maximum (50 μm) at zero gap size for steel-quartz pair. The maximum ablation depth for brass-quartz pair was 25 μm. The effects of laser power on etching depth and laser scan speed has also been reported.