Nanomanipulator Based on a High-Speed Atomic Force Microscopy

Abstract:

We developed a real-time nanomanipulation system based on high-speed atomic force microscopy (HS-AFM). During manipulation, the operation of the manipulation is momentarily interrupted for a very short time for high-speed imaging; thus, the topographical image of the fabricated surface is periodically updated during the manipulation. By using a high-speed imaging technique, the interrupting time could be much reduced during the manipulation; as a result, the operator almost does not notice the blink time of the interruption for imaging during the manipulation. As for the high-speed imaging technique, we employed a contact-mode HS-AFM to obtain topographic information through the instantaneous deflection of the cantilever during high-speed scanning. By using a share motion PZT scanner, the surface could be imaged with a frame rate of several fps. Furthermore, the high-speed AFM was coupled with a haptic device for human interfacing. By using the system, the operator can move the AFM probe into any position on the surface and feel the response from the surface during manipulation. As a demonstration of the system, nanofabrication under real-time monitoring was performed. This system would be very useful for real-time nanomanipulation and fabrication of sample surfaces.

• Periodical: Key Engineering Materials (Volume 516)
• Pages: 396-401
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.516.396
• Online since: June 2012
• Authors: Itsuhachi Ishisaki, Yuya Ohashi, Tatsuo Ushiki, Futoshi Iwata
• Keywords: Atomic Force Microscopy (AFM), High-Speed Imaging, Nanomanipulation, Nanometre-Scale Fabrication

References

[1] T. Junno, K. Deppert, L. Montelius, L. Samuelson, Controlled manipulation of nanoparticles with an atomic force microscope, Appl. Phys. Lett. 66 (1995) 3627-3629.

DOI: 10.1063/1.113809

[2] D.M. Schaefer, R. Reifenberger, A. Patil, R.P. Andres, Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope, Appl. Phys. Lett. 66 (1995) 1012-1014.

DOI: 10.1063/1.113589

[3] L.T. Hansen, A. Kuhle, A.H. Sorensen, J. Bohr, P.E. Lindelof, A technique for positioning nanoparticles using an atomic force microscope, Nanotechnology 9 (1998) 337-342.

DOI: 10.1088/0957-4484/9/4/006

[4] D. Wouters, U.S. Schubert, Nanolithography and nanochemistry: probe-related patterning techniques and chemical modification for nanometer-sized device, Angew. Chem. In. Ed. 43 (2004) 2480-2495.

DOI: 10.1002/anie.200300609

[5] D. Fotiadis, S. Scheuring, S.A. Müller, A. Engel, D.J. Müller, Imaging and manipulation of biological structures with the AFM, Micron 33 (2002) 385-397.

DOI: 10.1016/s0968-4328(01)00026-9

[6] Z. Liu, Z. Li, G. Wei, Y. Song, L. Wang, L. Sun, Manipulation, dissection, and lithography using modified tapping mode tomic force microscope, Microsc. Res. Tech. 69 (2006) 998-1004.

DOI: 10.1002/jemt.20379

[7] P.A. Williams, A. M. Patel, M. Sinclair, A. Seeger, A. Helser, Controlled placement of an individual carbon nanotube onto a microelectromechanical structure, Appl phys. lett. 80 (2002) 2574-2576.

DOI: 10.1063/1.1467701

[8] K. Hänel, A. Brinkner, S. Müllegger, A. Winkler, C. Wŏll, Manipulation of organic needles using an STM operated under SEM control, Surf. Sci. 600 (2006) 2411-2416.

DOI: 10.1016/j.susc.2006.03.030

[9] M.R. Falvo, G. Clary, A. Helser, S. Paulson, R.M. Taylor II, V. Chi, F.P. Brooks Jr., S. Washburn, R. Superfine, Nanomanipulation experiments exploring frictional and mechanical properties of carbon nanotubes, Microsc. Microanal. 4 (1999) 504-512.

DOI: 10.1017/s1431927698980485

[10] L. Guangyong, X. Ning, H. W. Donna, In situ sensing and manipulation of molecules in biological samples using a nanorobotic system, Nanomedicine 1 (2005) 31-40.

[11] F. Iwata, K. Ohara, Y. Ishizu, A. Sasaki, H. Aoyama, T. Ushiki, Nanometer-scale manipulation and ultrasonic cutting using an atomic force microscope controlled by a haptic device as a human interface, Jpn. J. Appl. Phys. 47 (2008) 6181-6185.

DOI: 10.1143/jjap.47.6181

[12] F. Iwata, S. Kawanishi, H. Aoyama, T. Ushiki, Development of a nano manipulator based on an atomic force microscope coupled with a haptic device: a novel manipulation tool for scanning electron microscopy, Arch. Histol. Cytol. 72 (2009) 271-278.

DOI: 10.1679/aohc.72.271

[13] T. Ando, T. Uchihashi, N. Kodera, A. Miyagi, R. Nakakita, H. Yamashita, M. Sakashita, High-speed atomic force microscopy for studying the dynamic behavior of protein molecules at work, Jpn. J. Appl. Phys. 45 (2006) 1897-(1903).

DOI: 10.1143/jjap.45.1897

[14] A.D.L. Humphris, M.J. Miles, J.K. Hobbs, A mechanical microscope: High-speed atomic force microscopy, Appl. Phys. Lett. 86 (2005) 034106-034108.

DOI: 10.1063/1.1855407

[15] A. Sasaki, F. Iwata, A. Katsumata, T. Akiyama, J. Fujiyasu, A stable scanning tunneling microscope designed for investigations of organic thin films in air, Rev. Sci. Instrum. 68 (1997) 1296-1299.

DOI: 10.1063/1.1147892