Intelligent Fuzzy Ziegler-Nichols-Based Controller Design of a SPM System with Parameters Variation

Abstract:

This research applied a stylus probe without balance and lever arm as in the previous design of a contact-force-controlled Scanning Probe Microscope (SPM) system. The controller integrated both Ziegler-Nichols-based and intelligent fuzzy methods; thus the systems relative stability can be reserved under the nominal conditions. In addition, one can see that both hysteresis and parameter variation effects of the force actuator can be reduced. Comparing the results with the traditional Ziegler-Nichols-based controller by simulation, one can see that the proposed systems are much more robust.

• Periodical: Key Engineering Materials (Volume 516)
• Pages: 402-407
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.516.402
• Online since: June 2012
• Authors: Jium Ming Lin, Kun Tai Cho, Po Kuang Chang
• Keywords: Hysteresis Effect, Intelligent Fuzzy Controller, Linear Variable Differential Transformer, Load Cell, Parameter Variation, Robustness, Scanning Probe Microscope, Ziegler-Nichols Method

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