Technical Performance of Zirconia-Coated Carbonyl-Iron-Particles Based Magnetic Compound Fluid Slurry in Ultrafine Polishing of PMMA
A kind of zirconia-coated carbonyl-iron-particles (CIPs), which show long-time stability against aqueous, is installed in magnetic compound fluid (MCF) to polish PMMA. Performance (normal polishing force and surface roughness) of zirconia-coated CIP based MCF slurry with different CIP concentrations is investigated. For comparison, the performances of the conventional non-coated CIP (i.e., HQ) based MCF slurry and MRF slurry in which DI-water is employed instead of MF are also examined. In the presence of Al2O3 abrasive particles, the use of zirconia-coated CIP based MCF slurry can not result in better polishing performances compared with conventional HQ CIP based MCF slurry; In the absence of Al2O3 abrasive particles, higher normal polishing force and smoother work-surface were obtained with the zirconia-coated CIP based MCF slurry rather than the MRF slurry; For the zirconia-coated CIP based MCF slurry without abrasive particles, the concentration of zirconia-coated CIP should be less than a certain value (in the current work, 70 wt. %), otherwise MCF slurry shows bad particle dispersion and is easily dried, resulting in the loss of its polishing ability.
Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou
H. R. Guo et al., "Technical Performance of Zirconia-Coated Carbonyl-Iron-Particles Based Magnetic Compound Fluid Slurry in Ultrafine Polishing of PMMA", Key Engineering Materials, Vols. 523-524, pp. 161-166, 2012