High Throughput Method to Fabricate Ordered Nano Dot Array on Various Plastic Films

Abstract:

In this paper, we propose a high throughput method to fabricate ordered metal nano dot array on a plastic film by combination of patterning by nano plastic forming, coating, annealing, and transferring to a plastic film. The effects of process parameters such as indentation load, annealing temperature on the formation of gold nano dot array and dot transfer ratio to a PDMS film are investigated. The results show that an ordered gold nano dot array is successfully formed on the pre-patterned substrate. The transfer of an ordered gold nano dot array to PDMS film is demonstrated.

• Periodical: Key Engineering Materials (Volumes 523-524)
• Pages: 633-638
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.523-524.633
• Online since: November 2012
• Authors: Phuc Duc Truong, Akinori Yamanaka, Masahiko Yoshino
• Keywords: Nano Dot Transfer, Nano Plastic Forming, Ordered Nano Dot Array, Plastic Film

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