A 3-DOF Friction-Free Planar Motor Using Piezoelectric Elements

Akihiro Torii; Mitsuhiro Nishio; Yuki Itatsu; Kae Doki; Akiteru Ueda

doi:10.4028/www.scientific.net/KEM.523-524.739

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 523-524A 3-DOF Friction-Free Planar Motor Using...

A 3-DOF Friction-Free Planar Motor Using Piezoelectric Elements

Abstract:

A friction-free planar motor, which is composed of piezoelectric elements (piezos), is proposed. The motor is based on the principle of an inchworm using levitation mechanisms. The vertical vibration of the piezo generates the levitation force of the motor. The horizontal deformation of the piezo causes the thrust force of the motor. These piezos realizes three degree-of-freedom motion on a flat surface. We measure the displacement in the vertical and horizontal direction of the levitation mechanism. The feasibility of the inchworm using levitation mechanisms is described.

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Periodical:

Key Engineering Materials (Volumes 523-524)

Pages:

739-744

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.523-524.739

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Online since:

November 2012

Authors:

Akihiro Torii, Mitsuhiro Nishio, Yuki Itatsu, Kae Doki, Akiteru Ueda

Keywords:

3-DOF, Microactuator, Piezoelectric Element, Planar Motor

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References

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