Development of Transient Thermal Deformation Control Techniques Using Thermal Modal Analysis Based Design Methods

Takeshi Morishima; Ron van Ostayen; Jan  van Eijk; Rob Munnig Schmidt

doi:10.4028/www.scientific.net/KEM.523-524.750

Paper Titles

Actuation Force Measurement Mechanism for Non-Contact Ultrasonic Suspension
p.727

Development of 2-DOF Hybrid Actuator System
p.733

A 3-DOF Friction-Free Planar Motor Using Piezoelectric Elements
p.739

A Method for Online Identification of Two-Inertia Mechanical System Including Nonlinear Friction
p.745

Development of Transient Thermal Deformation Control Techniques Using Thermal Modal Analysis Based Design Methods
p.750

Development and Evaluation of Miniaturized 6-DOF Parallel Link Manipulator
p.756

Influence of Servo Characteristics on Motion Accuracy of Parallel Kinematic Mechanism
p.762

Micro-Aspheric Mold Polishing Utilizing Magnetostrictive Vibration-Assisted Polishing Machine
p.768

Development of a Lens Driving Maglev Actuator for Laser Beam Off-Axis Cutting and Deep Piercing
p.774

HomeKey Engineering MaterialsKey Engineering Materials Vols. 523-524Development of Transient Thermal Deformation...

Development of Transient Thermal Deformation Control Techniques Using Thermal Modal Analysis Based Design Methods

Abstract:

Thermal errors are important sources of positioning errors in precision machines and are more and more becoming determining factors to meet increasing specifications. In this paper, thermal modal analysis is used to study and reduce the transient thermal displacement errors in precision machines. The temperature decomposition and the thermal displacement field decomposition by thermal modal analysis are derived. The reduction of transient thermal errors by adding additional heat loads is analyzed and the results of two different methods are compared.