Monitoring Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

S.N. Svitasheva; George A. Pozdnyakov

doi:10.4028/www.scientific.net/KEM.538.281

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 538Monitoring Technological Conditions for Preparing...

Monitoring Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

Abstract:

Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Two methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and Raman spectroscopy.

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Periodical:

Key Engineering Materials (Volume 538)

Pages:

281-284

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.538.281

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Online since:

January 2013

Authors:

S.N. Svitasheva, George A. Pozdnyakov

Keywords:

DLC-Films Properties, MHD-Accelerator of Plasma, Spectroscopic Ellipsometry

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References

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