Gap Adjustable MEMS Comb Resonator

Xuan Pu; Wei Hua Li; Zai Fa Zhou; Qin Gan Huang

doi:10.4028/www.scientific.net/KEM.562-565.1171

Paper Titles

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First-Principle Calculation of the Co Doped Anatase TiO₂
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Gap Adjustable MEMS Comb Resonator

Gap Adjustable MEMS Comb Resonator

Abstract:

A new structure of gap adjustable MEMS resonator has been proposed, and an analytical model of the gap adjustable structure has been developed. This model is a 2D vibration system. An opposite type MATA was used to push the fixed finger structure to move, as a result, the gap between the fingers changed. Simulation results show that the displacement of the mechanical oscillator increased when the MATA provided a step force, and the vibration amplitude was modulated when the force was in a cyclical form. In order to improve the stability of the structure, the folded beams were changed into clamped beams. An FEA simulation told us that when the gap changed, the vibration amplitude increased.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

1171-1176

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.1171

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Online since:

July 2013

Authors:

Xuan Pu, Wei Hua Li, Zai Fa Zhou, Qin Gan Huang

Keywords:

Amplitude Modulation, Comb Resonator, MATA, Simulation, Theoretical Model

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