Research on the Method of Laser Trimming to Reduce the Mode Coupling Error of Micro-Machined Vibratory Gyroscopes

Abstract:

Large mode coupling error would seriously restrict the improvement of gyroscope performance. In order to decrease the adverse influence from mode coupling error, this paper studied the formation mechanism of mode coupling error for a micro-machined vibratory gyroscope and certified the result studied by ANSYS analysis. Based on our analysis, it is found that removing material from both sides of the center lines of oscillation could arouse errors of anti-phase each other, which demonstrates that trimming could reduce mode coupling error on the other hand. Finally, experimental study was implemented on the micro-machined vibratory gyroscope by UV laser micromachining technology. Results indicated that laser trimming method on the basis of the phase relationship between mode coupling error signal and driving signal could effectively degrade the error. For certain prototype, the peak-peak voltage of the mode coupling error could be reduced from 6.6V to 0.2V after trimming when there is no angular velocity input.

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 204-209
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.204
• Online since: July 2013
• Authors: Hong Juan Cui, Kun He, Ding Bang Xiao, Zhan Qang Hou, Xue Liu, Xue Zhong Wu, Jian Bin Su
• Keywords: Center Line of Oscillation, Laser Trimming, Micro-Machined Vibratory Gyroscope, Mode Coupling

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