Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor
p.268
p.268
A Novel Structure of Polyimide-Based Humidity Sensor Used in Low Temperature Environment
p.276
p.276
Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure
p.280
p.280
Edge Effect on Viscous Drag of the Rotor in Liquid Floating Rotational Micro-Gyroscope
p.286
p.286
Micro-Displacement Sensing Circuit for Gyroscope with Levitated Rotor
p.292
p.292
Liquid-Suspended Rotor Gyroscope Multiphase Driving Technology
p.296
p.296
Design of Hall Vehicle Speed Sensor Comprehensive System
p.302
p.302
System Simulation and Test of a Field Emission Accelerometer
p.306
p.306
A Fourth-Order MASH Sigma-Delta Modulator in Inertial Sensors
p.311
p.311
Micro-Displacement Sensing Circuit for Gyroscope with Levitated Rotor
Abstract:
This paper presents a micro-displacement sensing circuit, which can detect sensing capacitors of levitated rotor. To ensure the high resolution, noise analysis of pre-amplifier of micro-displacement sensing circuit is conducted. The results show that choosing low noise amp and decreasing Cf /C1 can reduce the electronic noise.
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Periodical:
Key Engineering Materials (Volumes 562-565)
Pages:
292-295
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Online since:
July 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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