Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor

Abstract:

The static bending model of microcantilever with monolayer molecules has been established based on energy method, in which the change in neutral layer position caused by adsorption-induced stress is introduced. On this basis, we have analyzed the relationship between the bending curvature radius of a microcantilever with its thickness, Young’s modulus and molecule-molecule distance of adsorbed molecules when it is adsorbed with monolayer water molecules. Additionally, we have investigated the effect of change in neutral layer position on the static behavior of microcantilever sensors. The results show that 1)the bending curvature radius of microcantilever is the linear, quadratic and eight approximation function of its Young’s modulus, thickness and distance of adsorbed molecules, respectively; 2)the predicted error of bending curvature radius caused by the change in neutral layer position slightly increases with decreasing Young’s modulus and thickness, whereas the effect of distance between adsorbed molecules on the error is significant; 3)the change in neutral layer position can cause a significant effect on the sensitivity and surface strain of the microcantilever

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 268-275
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.268
• Online since: July 2013
• Authors: Fei Wang, Liang Zhao, Yan Ling Zhang, Da Lei Jing
• Keywords: Adsorption, Microcantilever, Neutral Layer Position, Static Bending Model

References

[1] Weeks B.L., J. Camarero, A. Noy, et al., A microcantilever-based pathogen detector, Scanning. 25 (2003) 297-299.

DOI: 10.1002/sca.4950250605

[2] Ramos D T.J., Mertens J, Calleja M and Zaballos A, Origin of the response of nanomechanical resonators to bacteria adsorption J. Appl. Phys. 100 (2006).

DOI: 10.1063/1.2370507

[3] Archakov A.I., Y.D. Ivanov, A.V. Lisitsa, et al., AFM fishing nanotechnology is the way to reverse the Avogadro number in proteomics, Proteomics. 7 (2007) 4-9.

DOI: 10.1002/pmic.200600467

[4] Krause A R V.N.C., Senesac L, Thundat T and Finot E Trace explosive detection using photothermal deflection spectroscopy J. Appl. Phys. 103 (2008).

DOI: 10.1063/1.2908181

[5] Pin Lu H.P.L., C.Lu and S.J.O'Shea, Surface stress effects on the resonance properties of cantilever sensors, Phys.Rev. B 72 (2005).

[6] Zhang N H C.J., Li J J, and Tan Z Q Mechanical properties of DNA biofilms adsorbed on microcantilevers in label-free biodetections, Biomaterials. 31 (2010).

DOI: 10.1016/j.biomaterials.2010.05.028

[7] Sushko M L H.J.H., Shluger A L, Mckendry R A and Watari M, Physics of nanomechanical biosensing on cantilever arrays, Adv. Mater. 20 (2008).

DOI: 10.1002/adma.200801344

[8] Zhang J Q Y.S.W., Feng X Q, Theoretical analysis of resonance frequency change induced by adsorption, J.Phys.Lett. 41 (2008).

[9] G.G. Stoney, The tension of metallic films deposited by electolysis, Proc.R.Soc.Lond. 82 (1909).

[10] D.W. Dareing T.T., Simulation of adsorption-induced stress of a microcantilever sensor, Appl .Phys 97 (2005).

[11] R. E. Martinez W.M.A.a.J.A.G., Direct measurement of crystal surface stress, Phys.Rev.Lett. 64 (1990).

[12] Yu H H.Q.A., Liu X X, Modeling of H2O adsorption-induced curvature of a metal/silicon nanocantilever, Appl. Surf.Sci. 255 (2009).