Capillary Condensation Adhesion Phenomena and Analysis of the Micromechanical Gyroscope

Abstract:

In MEMS, the size of micro-structure is usually in the micron and even nanoscale. It's easier to form capillary phenomenon than the macroscopic system. In view of this phenomenon, this article is based on the micro-mechanical gyroscope as the research object, to analyze the occurrence of capillary condensation of adhesion phenomenon. Firstly, we derive the Kelvin equation for capillary condensation, and then combination of the Kelvin equation introduce the capillary condensation of the adhesion phenomenon; Secondly, it analyzes the dynamics characteristics of its structure existing the liquid bridge, and analyzes the causes of the liquid bridge; Finally, it analyzes the capillary adhesion phenomena on the performance of the micro-mechanical gyroscope,as well as how to avoid the generation of capillary condensation adhesion.

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 251-254
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.251
• Online since: July 2013
• Authors: Yun Li He, Hai Peng Liu, Shi Qiao Gao, Cai Feng Wang
• Keywords: Capillary Condensation Adhesion Phenomena, Kelvin Equation, Liquid Bridge, MEMS

References

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