The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Li Shen; Shi Qiao Gao; Yan Wei Guan

doi:10.4028/www.scientific.net/KEM.562-565.247

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565The Effect of Casimir Force to the Performance of...

The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Abstract:

Casimir had measured the Casimir force through experimental methods, and fitted the empirical formula between the plates. On its basis we analyse that when the gap of two separating surfaces achieves submicron in micro devices, the effect of the Casimir force to the micro-devices is great and this Casimir effect can not be ignored. The results show that: Considering the Casimir force or not, the extreme value of acceleration which can be detected by micro-accelerometer is different, and we have got the specific numerical fitting figure by Matlab .

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

247-250

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.247

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Online since:

July 2013

Authors:

Li Shen, Shi Qiao Gao, Yan Wei Guan

Keywords:

Casimir Force, Micro-Accelerometer

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References

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