A Sub 0.8 Degree per Hour Mode-Matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode

Chun Hua He; Qian Cheng Zhao; Da Chuan Liu; Zhen Chuan Yang; Gui Zhen Yan

doi:10.4028/www.scientific.net/KEM.562-565.260

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565A Sub 0.8 Degree per Hour Mode-Matching MEMS...

A Sub 0.8 Degree per Hour Mode-Matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode

Abstract:

A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper, then closed loop control for the sense mode is adopted to improved the performances. Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%, and a bias instability of 0.77deg/h, while they are 60mV/deg/s, 1%, 4.6% and 9.8deg/h in the open loop controlled sense mode system, respectively. These performances can be improved by more than one order of magnitude in the closed loop control system.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

260-264

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.260

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Online since:

July 2013

Authors:

Chun Hua He, Qian Cheng Zhao, Da Chuan Liu, Zhen Chuan Yang, Gui Zhen Yan

Keywords:

Closed Loop Control, MEMS Vibratory Gyroscope, Mode-Matching, Nonlinearity

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