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HomeKey Engineering MaterialsKey Engineering Materials Vol. 605Study of Free-Standing Electroded PZT Thick-Films:...

Study of Free-Standing Electroded PZT Thick-Films: From Materials to Microsystems

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Abstract:

Free-standing electroded piezoelectric PZT thick-lms are straightforward fabricatedthanks to the association of the low-cost screen-printing technology with the sacricial layermethod. Au/PZT/Au bridges are directly attached onto the alumina substrate on top of it theyare processed. In addition, completely released disks are also processed. A study of the behaviourof these components shows the inuence of both the releasing process and the densicationon the piezoelectric properties of the PZT layer. From the electromechanical measurements,electroded PZT cantilevers and disks are promising for actuator, sensor or SHM applications.

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Materials and Applications for Sensors and Transducers III

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Periodical:

Key Engineering Materials (Volume 605)

Pages:

55-58

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.605.55

Citation:

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Online since:

April 2014

Authors:

Helene Debeda, Riadh Lakhmi, Valerie Pommier-Budinger, Claude Lucat

Keywords:

Densification, MEMS, Piezoelectric, PZT, Screen-Printing, Thick-Film

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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