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Formation of Vanadium Oxide Thin Films Prepared from Aqueous Sol-Gel System
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Formation of Vanadium Oxide Thin Films Prepared from Aqueous Sol-Gel System

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Abstract:

Vanadium oxide thin films are promising materials for various applications. Much attention has been devoted to thermotropic VO2(M/R) films which exhibit semiconductor-conductor phase transition at 67 °C making them excellent materials for switching applications. Non-thermotropic VO2(B) films are semiconducting and have layered structure which makes them interesting for gas sensing applications. Vanadium pentoxide films are also of great interest for photocatalytic production of H2 by H2O decomposition as well as for gas sensing. In this paper the preparation of vanadium oxide thin films by using the spin coating of V2O5·nH2O aqueous gel on Si/SiO2 and lime-glass substrates is reported. The as-deposited films were annealed in either air or H2/Ar atmosphere at normal or low pressure in order to prepare V2O5 and VO2 thin films. The obtained samples were characterized by XRD and SEM.

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Periodical:

Key Engineering Materials (Volume 605)

Pages:

79-82

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.605.79

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Online since:

April 2014

Authors:

Olivier Monfort, Tomas Roch, Maros Gregor, Leonid Satrapinskyy, Tomas Plecenik, Andrej Plecenik, Gustav Plesch

Keywords:

Sol-Gel, Spin Coating, Thin Film, Vanadium Oxide, X-Ray Diffraction (XRD)

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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