Study of the Nanoindentation Induced Defects in Nanocomposite n-TiC/a-C:H Films

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The aim of the present work is to study the nanoindentation induced defects in as-deposited and annealed nanocomposite n-TiC/a-C:H coatings. Furthermore, the resistance of the coatings against indentation induced defect creation was studied using TEM analysis of lamellas prepared using a focused ion beam for both as-deposited and annealed samples.

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159-162

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March 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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