Research on Natural Frequency of MEMS Structure with Meander Suspensions by Mechanical Character Analysis

Yi Jun Li; Ming Zhu Sun; Xin Zhao

doi:10.4028/www.scientific.net/KEM.609-610.1369

Paper Titles

The Influence of Electrodes Position to Alternating Current Annular Micromixer
p.1343

Design and Research of Dynamical Property Testing System for Nano and Micron Inertial Components
p.1349

Kinematic Analysis of Ultrasonic Vibration Assisted Micro End Grinding
p.1357

Artifacts in KPFM in FM, AM and Heterodyne AM Modes
p.1362

Research on Natural Frequency of MEMS Structure with Meander Suspensions by Mechanical Character Analysis
p.1369

Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology
p.1375

Effects of Structure and Air Damping on Quality Factor under Various Pressure Environments Based on Experimental Research
p.1381

Effects of Droplets' Collision on Heat and Mass Transfer between High-Temperature Gas and Micron Water Droplets
p.1386

Observation of Ferromagnetic Resonance in Magnetic Exchange Force Microscopy (MExFM)
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Research on Natural Frequency of MEMS Structure...

Research on Natural Frequency of MEMS Structure with Meander Suspensions by Mechanical Character Analysis

Abstract:

A new concept of using four meander suspensions as a constraint is proposed to construct planar spring-like energy harvester actuators with larger displacement. Meander suspensions with multi-folded beams having three vibrating directions. This paper introduce a new structure of “-type” to calculate modulus of elasticity of one meander suspensions. Based upon the micro deformation theory and the displacement superposition theory, the expression on the displacement for the movement end of the meander beams by outer forces and force moments are deduced. Since the energy harvester is geometric symmetry, elasticity coefficient and natural frequency of the energy harvester will be deduce by above given information. The finite-element analysis was used to model the performances and verified the above mentioned mechanic analysis method.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

1369-1374

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.1369

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Online since:

April 2014

Authors:

Yi Jun Li, Ming Zhu Sun, Xin Zhao

Keywords:

Energy Harvester, Finite Element, Meander Suspensions, Mechanical Analysis

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