Effects of Structure and Air Damping on Quality Factor under Various Pressure Environments Based on Experimental Research

Abstract:

This paper presents an analysis about the variation of quality factor (Q-factor) aiming at the complex micro resonator to explore the mechanism of the energy loss under different pressures. To demonstrate the work, a series of resonators are designed, which mainly differs in the squeeze-damping and scale of the beam. According to corresponding structure, the Q-factor is measured at different pressures while the theoretical air damping model combined with Christians model is also proposed. The air damping models of three types are proved to have 10%~30% relative error compared to experimental results in low vacuum, respectively. And, for the high vacuum, the structural energy loss plays an important role on the Q-factor, which increases with the decrement of comb quantity and the beam width.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 1381-1385
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.1381
• Online since: April 2014
• Authors: Ling Yun Wang*, Xiao Ping Wang, Xin Yan, Jie He, Jin Wei, Ling Ke Yu, Jian Fa Cai, Dao Heng Sun
• Keywords: Air Damping, Energy Loss, Q-Factor, Structure, Vacuum Level

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