The Failure of the Novel Solid MEMS Switch in Multi-Physical Coupling Field

Fang Yi Liu; Wen Zhong Lou; Ying Wang; Fu Fu Wang

doi:10.4028/www.scientific.net/KEM.609-610.1404

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The Failure of the Novel Solid MEMS Switch in Multi-Physical Coupling Field
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The Failure of the Novel Solid MEMS Switch in Multi-Physical Coupling Field

Abstract:

The novel solid MEMS switch can improve the performance of the MEMS initiator, which will be more secure and reliable.While the leads of its package are weak under launch environment. Therefore, this paper aims to carry out multi-physical field reliability analysis, by using FEM simulation analysis, which can simulate the real launch environment better and obtain the reliability and potential failure modes of leads in impact, temperature, current coupling field, thus providing theory reference for the design and application of the novel solid MEMS switch.