Fabrication and Phase-Transition Characteristic Investigation of Nanocrystalline VO2 Thin Film

Xi Qu Chen; Xi Zheng Hu; Qiang Lv

doi:10.4028/www.scientific.net/KEM.609-610.260

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Fabrication and Phase-Transition Characteristic...

Fabrication and Phase-Transition Characteristic Investigation of Nanocrystalline VO₂ Thin Film

Abstract:

In this paper, nanocrystalline VO₂ thin film is fabricated by a kind method of two steps and its phase transition characteristics are investigated. The two-step method contains low-temperature reactive ion sputtering and post-annealing, and its process parameters determine the phase transition properties of fabricated VO₂ thin film. With optimized process parameters, VO₂ thin film with nanocrystalline structure can be successfully fabricated and has excellent phase transition performance for smart glass and optical switch.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

260-265

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.260

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Online since:

April 2014

Authors:

Xi Qu Chen*, Xi Zheng Hu, Qiang Lv

Keywords:

Fabrication, Nanocrystalline, VO₂

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