Nanohole Coat/Fill with Pt via Chemical Deposition in Supercritical Fluids

Eiichi Kondoh; Toshiaki Goto; Mitsuhiro Watanabe

doi:10.4028/www.scientific.net/KEM.617.184

Paper Titles

Control of Shell Thickness of Hollow Silica-Alumina Composite Spheres and their Activity for Hydrolytic Dehydrogenation of Ammonia Borane
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Fabrication of Hollow Silica-Alumina Composite Spheres Using L(+)-Arginine and their Catalytic Performance for Hydrolytic Dehydrogenation of Ammonia Borane
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Magnetic and Fluorescent Hybrid Silica Nanoparticles Based on the Co-Encapsulation of γ-Fe₂O₃ Nanocristals and [Mo₆Br₁₄]^2- Luminescent Nanosized Clusters by Water-in-Oil Microemulsion
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Multi-Functional Silica Nanoparticles Based on Metal Atom Clusters: From Design to Toxicological Studies
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Nanohole Coat/Fill with Pt via Chemical Deposition in Supercritical Fluids
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Preparation of CuCrO₂ Powders with High Surface Areas
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Preparation of Novel TiO₂-Silica Filter Photocatalyst Derived from Titanium Alkoxy-Diolate Precursor
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Synthesis and Growth Mechanism of SiC/SiO₂ Core-Shell Nanowires by Thermal Evaporation Method
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Evaluation of Iodine-Adsorption on Magnesium Compounds Toward Fixing of Radioactive Iodine
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 617Nanohole Coat/Fill with Pt via Chemical Deposition...

Nanohole Coat/Fill with Pt via Chemical Deposition in Supercritical Fluids

Abstract:

This paper demonstrates nanostructure formation performed by supercritical fluid chemical deposition. Pt was deposited through hydrogen reduction of a Pt chelate being dissolved in supercritical carbon dioxide. Pt was deposited conformally inside nanotrences, however Pt did not grow thick due to a very long incubation time for the nucleation. Interestingly, SFCD Pt grew thick on already-existing noble metals. A two-step SFCD process was employed, where a Pt seed layer was deposited first and Pt was grown thicker in the subsequent run. This enabled to fill Pt in nanotrenches and nanoholes.

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Periodical:

Key Engineering Materials (Volume 617)

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184-186

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.617.184

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Online since:

June 2014

Authors:

Eiichi Kondoh*, Toshiaki Goto, Mitsuhiro Watanabe

Keywords:

Carbon Dioxide, Platinum, Supercritical Fluid, Thin Film

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References

[1] J. F. Scott, Jpn. J. Appl. Phys. 38 (1999) 2272.

Google Scholar

[2] M. Kadoshima, T. Nabatame, K. Iwamoto, N. Mise, H. Ota, A. Ogawa, M. Takahashi, M. Ikeda, H. Satake and A. Torium,: Jpn. J. Appl. Phys. 45 (2006) 6225.

DOI: 10.1143/jjap.45.6225

Google Scholar

[3] J. M. Blackburn, D. P. Long, and A. Cabañas, Science 294 (2001) 141.

Google Scholar

[4] E. Kondoh and H. Kato, Microelectron. Eng. 64 (2002) 495.

Google Scholar

[5] X. -R. Ye, Y. Lin, C. Wang, M. H. Engelhard, Y. Wang, and C. M. Wai, J. Mater. Chem. 14 (2004) 908.

Google Scholar

[6] Y. Zhang, D. Kang, C. Saquing, M. Aindow, and C. Erkey, Ind. Eng. Chem. Res. 44 (2005) 4161.

DOI: 10.1021/ie050345w

Google Scholar

[7] E. Kondoh, Jpn. J. Appl. Phys. 44 (2005) 5799.

Google Scholar

[8] M.J. Tenorio, C. Pando, J.A.R. Renuncio, J.G. Stevens, R.A. Bourne, M. Poliakoff, A. Cabañas, J. Supercritical Fluids, 69 (2012) 21.

DOI: 10.1016/j.supflu.2012.05.003

Google Scholar

[9] E. Castillejos, M. Jahjah, I. Favier, A. Orejón, C. Pradel, E. Teuma, A. M. Masdeu-Bultó, P. Serp, M. Gómez, Chemcatchem 4 (2012) 118.

DOI: 10.1002/cctc.201100244

Google Scholar

[10] M. Hiramatsu, T. Machino, K. Mase, M. Hori, and H. Kano, J. Nanosci. Tchnol. 10 (2010) 4023.

Google Scholar

[11] M. Watanabe, T. Akimoto, and E. Kondoh, Phys. Status Solidi A 209 (2012) 2514.

Google Scholar

[12] E. Kondoh, Ext. Abst. Int. Conf. Micro- and Nano- Eng. 2006, P-NSC05.

Google Scholar